Patent Assignment
Reel/Frame 012081/0553
Assignment of Assignor's Interest
Recorded: 2001-08-10
Received: 2001-08-22
Pages: 2
Assignor
LEE, GILL YOUNG
Executed: 2001-08-02
Assignee
INFINEON TECHNOLOGIES NORTH AMERICA CORP.
1730 NORTH FIRST STREET, SAN JOSE, CA, 95112, UNITED STATES
Covered Property
(1)
Method for Low Temperature Chemical Vapor Deposition of Low-K Films Using Selected Cyclosiloxane and Ozone Gases for Semiconductor Applications
Application:
09/928,209 →