Patent Assignment
Reel/Frame 012082/0163
Assignment of Assignor's Interest
Recorded: 2001-08-10
Received: 2001-08-22
Pages: 3
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NY, 10504, UNITED STATES
Covered Property
(1)
Method for Low Temperature Chemical Vapor Deposition of Low-K Films Using Selected Cyclosiloxane and Ozone Gases for Semiconductor Applications
Application:
09/928,209 →