Patent Assignment
Reel/Frame 012084/0180
Assignment of Assignor's Interest
Recorded: 2001-08-14
Received: 2001-08-22
Pages: 2
Assignor
SASAKI, YASUSHI
Executed: 2001-08-03
Assignee
NEC CORPORATION
MINATO-KU, 7-1 SHIBA 5-CHOME, TOKYO, JPX, JAPAN
Covered Property
(1)
Method for Drying a Semiconductor Wafer, a Mixture for Drying, and a Dryer
Application:
09/929,586 →