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App. No. 09/929,586 · Confirmation No. 9138

METHOD FOR DRYING A SEMICONDUCTOR WAFER, A MIXTURE FOR DRYING, AND A DRYER

Inventor: Yasushi Sasaki
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2001-08-14 TRNA Transmittal of New Application 1 View
2001-08-14 SPEC Specification 7 View
2001-08-14 CLM Claims 1 View
2001-08-14 ABST Abstract 1 View
2001-08-14 DRW Drawings-only black and white line drawings 3 View
2001-08-14 OATH Oath or Declaration filed 1 View
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Quick Facts
App. No.
09/929,586
Filed
2001-08-14
Granted
2002-05-07
Pub. No.
US20020023370A1
Art Unit
3749
PTA
0 days