Patent Assignment
Reel/Frame 012112/0355
Assignment of Assignor's Interest
Recorded: 2001-08-27
Received: 2001-08-31
Pages: 2
Assignor
MATTSON TECHNOLOGY, INC.
Executed: 2001-08-14
Assignee
MATTSON THERMAL PRODUCTS, INC.
2800 BAYVIEW DRIVE, RICHARD SEHR, FREMONT, CA, 94538, UNITED STATES
Covered Property
(1)
High temperature short time curing of low dielectric constant materials using rapid thermal processing techniques
Application:
09/789,062 →