Patent Assignment
Reel/Frame 012133/0811
Assignment of Assignor's Interest
Recorded: 2001-08-29
Received: 2001-09-10
Pages: 4
Assignee
ULTRATECH STEPPER, INC.
3050 ZANKER ROAD, SAN JOSE, CA, 95134, UNITED STATES
Covered Property
(1)
Method of Forming a Silicide Region in a Si Substrate and a Device Having Same
Application:
09/896,160 →