Assignment of Assignor's Interest

Recorded: 2001-09-13 Pages: 2

Assignors

MORIYA, TSUYOSHI

Executed: 2001-09-03

ITO, NATSUKO

Executed: 2001-09-03

UESUGI, FUMIHIKO

Executed: 2001-09-03

Assignee

NEC CORPORATION

7-1, SHIBA 5-CHOME, MINATO-KU, TOKYO, JAPAN

Covered Property (1)

Semiconductor fabrication device and method for preventing the attachment of extraneous particles

Application: 09/950,759 →

Publication: US 2002/0036343