Patent Assignment
Reel/Frame 012186/0027
Assignment of Assignor's Interest
Recorded: 2001-09-19
Pages: 2
Assignors
MELNYCHUK, STEPHAN T.
Executed: 2001-09-04
PARTLO, WILLIAM N.
Executed: 2001-08-30
FOMENKOV, IGOR V.
Executed: 2001-09-04
NESS, RICHARD M.
Executed: 2001-09-04
BIRX DANIEL L., BY DEBORAH L. BIRX, EXEXUTRIX FOR THE ESTATE OF DANIEL L. BIRX
Executed: 2001-07-23
SANDSTROM, RICHARD L.
Executed: 2001-08-21
RAUCH, JOHN E.
Executed: 2001-08-21
Assignee
CYMER, INC.
LEGAL DEPARTMENT-MS/1-2A, 16750 VIA DEL CAMPO COURT, SAN DIEGO, CALIFORNIA, 92127
Covered Property
(1)
Plasma Focus Light Source with Active and Buffer Gas Control