Patent Assignment
Reel/Frame 012196/0605
Assignment of Assignor's Interest
Recorded: 2001-09-20
Pages: 3
Assignee
SAMSUNG ELECTRONICS CO., LTD.
416, MAETAN-DONG, PALDAL-GU, SUWON-CITY, KYUNGKI-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Semiconductor Wafer Washing System and Method of Supplying Chemicals to the Washing Tanks of the System