Patent Assignment
Reel/Frame 012200/0527
Assignment of Assignor's Interest
Recorded: 2001-09-21
Pages: 2
Assignee
NIKON CORPORATION
2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU, TOKYO 100-8331, JAPAN
Covered Property
(1)
Process End Point Detection Apparatus and Method, Polishing Apparatus, Semiconductor Device Manufacturing Method, and Recording Medium Recorded with Signal Processing Program