Patent Assignment
Reel/Frame 012234/0913
Assignment of Assignor's Interest
Recorded: 2001-10-03
Pages: 4
Assignee
SPEEDFAM-IPEC CORPORATION
305 NORTH 54TH STREET, CHANDLER, ARIZONA, 85226
Covered Property
(1)
Multizone Carrier with Process Monitoring System for Chemical-Mechanical Planarization Tool
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.