Patent Assignment
Reel/Frame 012257/0881
Assignment of Assignor's Interest
Recorded: 2001-10-15
Pages: 2
Assignor
MATSUMOTO, KEN
Executed: 2001-09-06
Assignee
CANON KABUSHIKI KAISHA
3-30-2, SHIMOMARUKO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Substrate Transfer Apparatus, Semiconductor Manufacturing Apparatus, and Semiconductor Device Manufacturing Method