Patent Assignment
Reel/Frame 012258/0117
Assignment of Assignor's Interest
Recorded: 2001-10-12
Received: 2001-10-22
Pages: 2
Assignor
AMARTUR, SUNDAR
Executed: 2001-10-10
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CA, 94538, UNITED STATES
Covered Properties
(2)
In-Situ Detection of Thin-Metal Interface Using High Resolution Spectral Analysis of Optical Interference
Application:
09/976,579 →
Sourcing of Bills of Materials
Application:
09/976,791 →