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App. No. 09/976,579 · Confirmation No. 2460

IN-SITU DETECTION OF THIN-METAL INTERFACE USING HIGH RESOLUTION SPECTRAL ANALYSIS OF OPTICAL INTERFERENCE

Inventor: Sundar Amartur
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗
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2001-10-12 FWCLM Index of Claims 1 View
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Quick Facts
App. No.
09/976,579
Filed
2001-10-12
Granted
2004-06-08
Art Unit
2877
PTA
-7 days