Patent Assignment
Reel/Frame 012259/0858
Assignment of Assignor's Interest
Recorded: 2001-10-15
Pages: 2
Assignors
TSUJI, AKITOSHI
Executed: 2001-06-27
SUENAGA, OSAMU
Executed: 2001-06-27
KOMIYAMA, KIYOSHI
Executed: 2001-06-27
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Managing Apparatus and Managing Method of a Semiconductor Manufacturing Apparatus