Patent Assignment
Reel/Frame 012267/0410
Assignment of Assignor's Interest
Recorded: 2001-10-12
Pages: 2
Assignor
AMARTUR, SUNDAR
Executed: 2001-10-10
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
In-Situ Detection of Thin-Metal Interface Using Optical Interference via a Dynamically Updated Reference
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.