Patent Assignment
Reel/Frame 012272/0423
Assignment of Assignor's Interest
Recorded: 2001-10-18
Received: 2001-10-25
Pages: 4
Assignee
ULTRATECH STEPPER, INC.
3050 ZANKER ROAD, SAN JOSE, CA, 95134, UNITED STATES
Covered Property
(1)
Motion Compensation System and Method for Lithography
Application:
09/933,583 →