IP Library › Patent Application 09933583
Patent Application Utility Small
App. No. 09/933,583 · Confirmation No. 6864

MOTION COMPENSATION SYSTEM AND METHOD FOR LITHOGRAPHY

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗
⬇ PDF
 Code Description Pages PDF
2001-08-20 TRNA Transmittal of New Application 2 View
2001-08-20 SPEC Specification 14 View
2001-08-20 CLM Claims 4 View
2001-08-20 ABST Abstract 1 View
2001-08-20 DRW Drawings-only black and white line drawings 3 View
2001-08-20 OATH Oath or Declaration filed 4 View
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Quick Facts
App. No.
09/933,583
Filed
2001-08-20
Granted
2003-04-29
Art Unit
2851
PTA
-28 days