Granted Patent
Utility
Small
US 6,753,947
· Confirmation No. 8612
LITHOGRAPHY SYSTEM AND METHOD FOR DEVICE MANUFACTURE
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2008-01-28 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2004-05-03 | IFEE |
Issue Fee Payment (PTO-85B) | 4 | View | |
| 2004-04-08 | PA.. |
Power of Attorney | 1 | View | |
| 2003-12-18 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 2 | View | |
| 2003-12-18 | SPEC |
Specification | 4 | View | |
| 2003-12-18 | CLM |
Claims | 21 | View | |
| 2003-12-18 | REM |
Applicant Arguments/Remarks Made in an Amendment | 10 | View | |
| 2003-12-18 | XT/ |
Extension of Time | 3 | View | |
| 2003-12-18 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2001-05-10 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-05-10 | SPEC |
Specification | 38 | View | |
| 2001-05-10 | CLM |
Claims | 12 | View | |
| 2001-05-10 | ABST |
Abstract | 1 | View | |
| 2001-05-10 | DRW |
Drawings-only black and white line drawings | 12 | View | |
| 2001-05-10 | OATH |
Oath or Declaration filed | 4 | View |
Inventors
Dan Meisburger
San Jose, CA
David A. Markle
Saratoga, CA
Attorneys & Agents of Record
Classification
USPC
355/69
H10P76/00
G03F7/70725
G03F7/70041
G03F7/70225
G03F7/70425
G03F7/7055
G03F7/70558
Prosecution
- Examiner
- BROWN, KHALED
- Art Unit
- 2877
- Customer No.
- 23308
- Docket No.
- 3521.151
- Confirmation No.
- 8612
Publication
- Pub. No.
- US20020186359A1
- Pub. Date
- 2002-12-12
Patent Term Adjustment
-121days
Child
is a Continuation in-part of
→
App. 10/035,764
· US 6,731,376
Filed 2001-10-22
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
PCT
is a Continuation of
→
PCT/US2002/009593
Filed 2002-03-27
· PCT - IPER (International Preliminary Examination Report) 409-416 Mailed
Child
is a Continuation in-part of
→
App. 09/933,583
· US 6,556,279
Filed 2001-08-20
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Quick Facts
- Patent No.
- US 6,753,947
- App. No.
- 09/854,226
- Filed
- 2001-05-10
- Granted
- 2004-06-22
- Pub. No.
- US20020186359A1
- Examiner
- BROWN, KHALED
- Art Unit
- 2877
- PTA
- -121 days
External Links