Patent Assignment
Reel/Frame 012291/0961
Assignment of Assignor's Interest
Recorded: 2001-08-16
Pages: 5
Assignee
STEAG HAMA TECH AG
FERDINAND-VON-STEINBEIS-RING 10, STERNENFELS, D-754, GERMANY
Covered Property
(1)
Method and Apparatus for Treating Substrates
Patent:
6,858,088 →
Application:
09/913,986 →
Related Assignments
(4)
Other recorded transfers of the patent in this record — the chain of ownership.
Change of Name
Mar 18, 2011
From: STEAG HAMATECH AG
To: HAMATECH AG
Reel/Frame 025982/0224 →
Merger
May 11, 2011
From: HAMATECH AG
To: SINGULUS TECHNOLOGIES AG
Reel/Frame 026263/0542 →
Assignment of Assignor's Interest
May 18, 2011
From: SINGULUS TECHNOLOGIES AG
To: HAMATECH APE GMBH & CO. KG
Reel/Frame 026302/0701 →
Change of Name
Aug 16, 2012
From: HAMATECH APE GMBH & CO. KG
To: SUSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO. KG.
Reel/Frame 028801/0484 →