Patent Assignment
Reel/Frame 026263/0542
Merger
Recorded: 2011-05-11
Pages: 6
Assignor
HAMATECH AG
Executed: 2007-11-07
Assignee
SINGULUS TECHNOLOGIES AG
HANAUER LANDSTR. 103, KAHL AM MAIN, D-63796, GERMANY
Covered Property
(1)
Method and Apparatus for Treating Substrates
Patent:
6,858,088 →
Application:
09/913,986 →
Related Assignments
(4)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Aug 16, 2001
From: DRESS, PETER; APPICH, KARL
To: STEAG HAMA TECH AG
Reel/Frame 012291/0961 →
Change of Name
Mar 18, 2011
From: STEAG HAMATECH AG
To: HAMATECH AG
Reel/Frame 025982/0224 →
Assignment of Assignor's Interest
May 18, 2011
From: SINGULUS TECHNOLOGIES AG
To: HAMATECH APE GMBH & CO. KG
Reel/Frame 026302/0701 →
Change of Name
Aug 16, 2012
From: HAMATECH APE GMBH & CO. KG
To: SUSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO. KG.
Reel/Frame 028801/0484 →