Patent Assignment
Reel/Frame 012303/0006
Assignment of Assignor's Interest
Recorded: 2001-11-09
Pages: 3
Assignors
OKUMURA, TOMOHIRO
Executed: 2001-08-22
MAEGAWA, YUKIHIRO
Executed: 2001-08-22
MATSUDA, IZURU
Executed: 2001-08-22
Assignee
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
1006, OAZA KADOMA, KADOMA-SHI, OSAKA-FU, JAPAN
Covered Property
(1)
Plasma Processing Method and Apparatus Thereof