Patent Assignment
Reel/Frame 012307/0438
Assignment of Assignor's Interest
Recorded: 2001-11-14
Pages: 2
Assignee
NEC CORPORATION
7-1, SHIBA 5-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Method for rescuing levenson phase shift mask from abnormal difference in transmittance and phase difference between phase shifter and non-phase shifter
Application:
09/987,401 →
Publication:
US 2002/0058188
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.