IP Library › Patent Application 09987401
Patent Application Utility
App. No. 09/987,401 · Confirmation No. 7033

Method for rescuing levenson phase shift mask from abnormal difference in transmittance and phase difference between phase shifter and non-phase shifter

Expressly Abandoned -- During Examination View Publication ↗
⬇ PDF
 Code Description Pages PDF
2001-11-14 TRNA Transmittal of New Application 1 View
2001-11-14 SPEC Specification 42 View
2001-11-14 CLM Claims 7 View
2001-11-14 ABST Abstract 1 View
2001-11-14 DRW Drawings-only black and white line drawings 28 View
2001-11-14 OATH Oath or Declaration filed 3 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
09/987,401
Filed
2001-11-14
Pub. No.
US20020058188A1
Art Unit
1756