Patent Assignment
Reel/Frame 012307/0796
Assignment of Assignor's Interest
Recorded: 2001-11-08
Pages: 3
Assignor
OBI, HIROKI
Executed: 2001-10-25
Assignee
TOKYO ELECTRON LIMITED
3-6 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Method for Aligning Two Objects, Method for Detecting Superimposing State of Two Objects, and Apparatus for Aligning Two Objects