Patent Assignment
Reel/Frame 012323/0828
Assignment of Assignor's Interest
Recorded: 2001-11-16
Pages: 3
Assignee
PROCESS DIAGNOSTICS, INC.
1050 KEIFER ROAD, SUNNYVALE, CALIFORNIA, 94086
Covered Property
(1)
Apparatus and Method for Enabling High Resolution Film Thickness and Thickness-Uniformity Measurements