Assignment of Assignor's Interest

Recorded: 2001-11-14 Received: 2001-12-13 Pages: 2

Assignor

AMARTUR, SUNDAR

Executed: 2001-11-13

Assignee

LAM RESEARCH CORPORATION

4650 CUSHING PARKWAY, FREMONT, CA, 94538, UNITED STATES

Covered Properties (2)

System for in-Situ Monitoring of Removal Rate/Thickness of Top Layer During Planarization

Application: 10/002,575 →

Horizontally Structured Manufacturing Process Modeling for Fixtures and Tooling

Application: 10/002,678 →