Patent Application
Utility
App. No. 10/002,575
· Confirmation No. 4237
SYSTEM FOR IN-SITU MONITORING OF REMOVAL RATE/THICKNESS OF TOP LAYER DURING PLANARIZATION
Inventor:
Sundar Amartur
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-10-14 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2002-03-05 | TRNA |
Transmittal of New Application | 3 | View | |
| 2002-03-05 | DRW |
Drawings-only black and white line drawings | 10 | View | |
| 2001-11-14 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-11-14 | SPEC |
Specification | 22 | View | |
| 2001-11-14 | CLM |
Claims | 5 | View | |
| 2001-11-14 | ABST |
Abstract | 1 | View | |
| 2001-11-14 | DRW |
Drawings-only black and white line drawings | 10 | View | |
| 2001-11-14 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Sundar Amartur
Fremont, CA
Attorneys & Agents of Record
Classification
USPC
451/57
B24B37/013
B24B37/042
B24B49/12
Prosecution
- Examiner
- MCDONALD, SHANTESE L
- Art Unit
- 3723
- Customer No.
- 25920
- Docket No.
- LAM2P308
- Confirmation No.
- 4237
Patent Term Adjustment
-9days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2008-05-18
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Quick Facts
- App. No.
- 10/002,575
- Filed
- 2001-11-14
- Granted
- 2003-12-30
- Examiner
- MCDONALD, SHANTESE L
- Art Unit
- 3723
- PTA
- -9 days
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