Patent Assignment
Reel/Frame 012375/0209
Assignment of Assignor's Interest
Recorded: 2001-12-14
Pages: 3
Assignors
SHANMUGASUNDRAM, ARULKUMAR P.
Executed: 2001-11-28
SCHWARM, ALEXANDER T.
Executed: 2001-11-28
PRABHU, GOPALAKRISHNA B.
Executed: 2001-11-29
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Feedback Control of a Chemical Mechanical Polishing Device Providing Manipulation of Removal Rate Profiles