Patent Assignment
Reel/Frame 012377/0070
Assignment of Assignor's Interest
Recorded: 2001-10-22
Pages: 17
Assignors
HOFFMAN, DANIEL J.
Executed: 2001-10-02
YE, YAN
Executed: 2001-10-22
KATZ, DAN
Executed: 2001-10-09
BUCHBERGER, DOUGLAS A., JR.
Executed: 2001-09-03
ZHAO, XIAOYE
Executed: 2001-10-03
CHIANG, KANG-LIE
Executed: 2001-10-17
HAGEN, ROBERT B.
Executed: 2001-10-17
MILLER, MATTHEW L.
Executed: 2001-10-02
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450-A, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Merie Plasma Reactor with Overhead Rf Electrode Tuned to the Plasma with Arcing Suppression