Patent Assignment
Reel/Frame 012381/0151
Assignment of Assignor's Interest
Recorded: 2001-12-13
Received: 2001-12-26
Pages: 2
Assignor
MATSUURA, SEIJI
Executed: 2001-12-09
Assignee
NEC CORPORATION
7-1, SHIBA 5-CHOME, MINATO-KU, TOKYO, JPX, JAPAN
Covered Property
(1)
Method for correcting spherical aberration of a projection lens in an exposure system
Application:
10/013,481 →