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App. No. 10/013,481 · Confirmation No. 2960

Method for correcting spherical aberration of a projection lens in an exposure system

Inventor: Seiji Matsuura
Abandoned -- Failure to Respond to an Office Action View Publication ↗
⬇ PDF
 Code Description Pages PDF
2001-12-13 TRNA Transmittal of New Application 1 View
2001-12-13 SPEC Specification 19 View
2001-12-13 CLM Claims 2 View
2001-12-13 ABST Abstract 1 View
2001-12-13 DRW Drawings-only black and white line drawings 6 View
2001-12-13 OATH Oath or Declaration filed 3 View
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Quick Facts
App. No.
10/013,481
Filed
2001-12-13
Pub. No.
US20020075458A1
Art Unit
2851