Patent Assignment
Reel/Frame 012387/0698
Assignment of Assignor's Interest
Recorded: 2001-11-01
Received: 2001-12-27
Pages: 3
Assignors
KUBO, AKIRA
Executed: 2001-10-24
TUCHIYA, YASUAKI
Executed: 2001-10-24
WAKE, TOMOKO
Executed: 2001-10-24
Assignee
NEC CORPORATION
7-1, SHIBA 5-CHOME, MINATO-KU, TOKYO, JPX, JAPAN
Covered Property
(1)
CMP process for a damascene pattern
Application:
10/015,973 →