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App. No. 10/015,973 · Confirmation No. 6857

CMP process for a damascene pattern

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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 Code Description Pages PDF
2001-11-01 TRNA Transmittal of New Application 2 View
2001-11-01 SPEC Specification 20 View
2001-11-01 CLM Claims 5 View
2001-11-01 ABST Abstract 1 View
2001-11-01 DRW Drawings-only black and white line drawings 14 View
2001-11-01 OATH Oath or Declaration filed 4 View
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Quick Facts
App. No.
10/015,973
Filed
2001-11-01
Pub. No.
US20020048958A1
Art Unit
2823