Patent Assignment
Reel/Frame 012387/0903
Assignment of Assignor's Interest
Recorded: 2001-12-19
Pages: 3
Assignors
RINN, KLAUS, DR.
Executed: 2001-11-21
FRICKE, WOLFGANG
Executed: 2001-11-21
WIENECKER, JOACHIM, DR.
Executed: 2001-11-23
Assignee
LEICA MICROSYSTEMS WETZLAR GMBH
ERNST-LEITZ-STRASSE 17-37, D-35578 WETZLAR, GERMANY
Covered Property
(1)
Method and Measuring Instrument for Determining the Position of an Edge of a Pattern Element on a Substrate
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.