Patent Assignment
Reel/Frame 012390/0536
Assignment of Assignor's Interest
Recorded: 2001-12-28
Pages: 2
Assignor
LU, ZHIMIN
Executed: 2001-08-02
Assignee
ASM AMERICA, INC.
3440 EAST UNIVERSITY DRIVE, PHOENIX, ARIZONA, 85034
Covered Property
(1)
Method and Apparatus to Correct Wafer Drift
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.