Patent Assignment
Reel/Frame 012400/0948
Assignment of Assignor's Interest
Recorded: 2001-12-26
Received: 2002-01-02
Pages: 2
Assignor
ITO, SHINYA
Executed: 2001-12-20
Assignee
NEC CORPORATION
7-1 SHIBA 5-CHOME, MINATO-KU, TOKYO 108-01, JPX, JAPAN
Covered Property
(1)
Enhanced Deposition Control in Fabricating Devices in a Semiconductor Wafer
Application:
10/025,469 →