Patent Application
Utility
App. No. 10/025,469
· Confirmation No. 2977
ENHANCED DEPOSITION CONTROL IN FABRICATING DEVICES IN A SEMICONDUCTOR WAFER
Inventor:
Shinya Ito
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-10-07 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2001-12-26 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-12-26 | ADS |
Application Data Sheet | 1 | View | |
| 2001-12-26 | SPEC |
Specification | 18 | View | |
| 2001-12-26 | CLM |
Claims | 5 | View | |
| 2001-12-26 | ABST |
Abstract | 1 | View | |
| 2001-12-26 | DRW |
Drawings-only black and white line drawings | 9 | View | |
| 2001-12-26 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Shinya Ito
Tokyo, JAPAN
Attorneys & Agents of Record
Classification
USPC
438/778
H10P14/20
H10P14/6336
C23C16/345
H10D84/038
H10D84/0133
H10D84/0149
H10D30/792
H10P14/6334
H10W20/077
H10P14/69433
H10W20/069
H10W20/081
H10W20/0698
H10P14/6682
H10W20/071
Prosecution
- Examiner
- LE, THAO P
- Art Unit
- 2818
- Customer No.
- 466
- Docket No.
- NE-1077-US/KWG
- Confirmation No.
- 2977
Foreign Priority
2000-394803
·
2000-12-26
·
JAPAN
Publication
- Pub. No.
- US20020081794A1
- Pub. Date
- 2002-06-27
Patent Term Adjustment
0days
No related applications found.
from
NEC CORPORATION
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-05-02
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Quick Facts
- App. No.
- 10/025,469
- Filed
- 2001-12-26
- Granted
- 2003-12-02
- Pub. No.
- US20020081794A1
- Examiner
- LE, THAO P
- Art Unit
- 2818
- PTA
- 0 days
External Links