Patent Assignment
Reel/Frame 012401/0299
Assignment of Assignor's Interest
Recorded: 2001-12-21
Pages: 2
Assignors
HASEGAWA, NORIO
Executed: 2001-10-29
TANAKA, TOSHIHIKO
Executed: 2001-10-30
TERASAWA, TSUNEO
Executed: 2001-11-10
Assignee
HITACHI, LTD.
6, KANDA SURUGADAI 4-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Device manufacturing method, photomask used for the method, and photomask manufacturing method
Application:
10/023,893 →
Publication:
US 2002/0081501
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.