Patent Assignment
Reel/Frame 012411/0324
Assignment of Assignor's Interest
Recorded: 2001-12-27
Pages: 2
Assignor
MATUMOTO, AKIRA
Executed: 2001-12-18
Assignee
NEC CORPORATION
7-1, SHIBA 5-CHOME, MINATO-KU, JAPAN
Covered Property
(1)
Method of manufacturing a semiconductor device including dual-damascene process
Application:
10/026,683 →
Publication:
US 2002/0081840