Patent Assignment
Reel/Frame 012421/0127
Assignment of Assignor's Interest
Recorded: 2001-12-21
Pages: 2
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Apparatus for Edge Polishing Uniformity Control
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.