Assignment of Assignor's Interest

Recorded: 2002-01-03 Received: 2002-01-10 Pages: 5

Assignors

HU, YAO ZHI

Executed: 2001-04-26

TAY, SING-PIN

Executed: 2001-04-26

HAUF, MARKUS

Executed: 2001-11-02

Assignee

MATTSON TECHNOLOGY, INC.

RICHARD SEHR, 2800 BAYVIEW DRIVE, FREMONT, CA, 94538, UNITED STATES

Covered Property (1)

Rapid Thermal Processing System for Integrated Circuits

Application: 09/836,098 →