Granted Patent
Utility
US 6,600,138
· Confirmation No. 7728
RAPID THERMAL PROCESSING SYSTEM FOR INTEGRATED CIRCUITS
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2017-10-16 | IMIS |
Miscellaneous Internal Document | 2 | View | |
| 2014-10-03 | IMIS |
Miscellaneous Internal Document | 1 | View | |
| 2001-04-17 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-04-17 | SPEC |
Specification | 22 | View | |
| 2001-04-17 | CLM |
Claims | 5 | View | |
| 2001-04-17 | ABST |
Abstract | 1 | View | |
| 2001-04-17 | DRW |
Drawings-only black and white line drawings | 6 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
219/411
H10P95/90
H05B3/0047
H10P72/0436
Prosecution
- Examiner
- FUQUA, SHAWNTINA T
- Art Unit
- 3742
- Customer No.
- 23416
- Docket No.
- 7590-8
- Confirmation No.
- 7728
Publication
- Pub. No.
- US20020148824A1
- Pub. Date
- 2002-10-17
Patent Term Adjustment
-213days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2019-09-30
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-01-03
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Quick Facts
- Patent No.
- US 6,600,138
- App. No.
- 09/836,098
- Filed
- 2001-04-17
- Granted
- 2003-07-29
- Pub. No.
- US20020148824A1
- Examiner
- FUQUA, SHAWNTINA T
- Art Unit
- 3742
- PTA
- -213 days
External Links