IP Library › Patent Application 10272462
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App. No. 10/272,462 · Confirmation No. 3060

RAPID THERMAL PROCESSING SYSTEM FOR INTEGRATED CIRCUITS

Inventors: Sing-Pin Tay, Yao Zhi Hu
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2015-02-10 IMIS Miscellaneous Internal Document 1 View
2004-01-30 IFEE Issue Fee Payment (PTO-85B) 1 View
2002-10-16 TRNA Transmittal of New Application 2 View
2002-10-16 SPEC Specification 23 View
2002-10-16 CLM Claims 6 View
2002-10-16 ABST Abstract 1 View
2002-10-16 DRW Drawings-only black and white line drawings 7 View
2002-10-16 OATH Oath or Declaration filed 2 View
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Quick Facts
App. No.
10/272,462
Filed
2002-10-16
Granted
2004-03-16
Pub. No.
US20030094446A1
Art Unit
3761
PTA
0 days