Patent Assignment
Reel/Frame 012428/0170
Assignment Merger
Recorded: 2002-01-07
Pages: 5
Assignor
ATMI ECOSYS CORPORATION
Executed: 2001-07-26
Assignee
ADVANCED TECHNOLOGY MATERIALS, INC.
7 COMMERCE DRIVE, DANBURY, CONNECTICUT, 06810
Covered Property
(1)
System for Stabilization of Pressure Perturbations from Oxidation Systems for Treatment of Process Gases from Semiconductor Manufacturing Operations
Patent:
5,873,388 →
Application:
08/659,865 →
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.