Assignment of Assignor's Interest

Recorded: 2001-12-26 Received: 2002-01-10 Pages: 2

Assignor

HEMKER, DAVID J.

Executed: 2001-12-21

Assignee

LAM RESEARCH CORPORATION

4650 CUSHING PARKWAY, FREMONT, CA, 94538, UNITED STATES

Covered Property (1)

Apparatus and Methods for Controlling Wafer Temperature in Chemical Mechanical Polishing

Application: 10/033,455 →