Patent Assignment
Reel/Frame 012434/0484
Assignment of Assignor's Interest
Recorded: 2001-12-13
Received: 2002-01-11
Pages: 3
Assignor
LOHMULLER, JURGEN
Executed: 2001-10-08
Assignee
STEAG MICRO TECH GMBH
CARL-BENZ-STRASSE 10, PLIEZHAUSEN, DEX, D-721, GERMANY
Covered Property
(1)
Method and Apparatus for Cleaning Substrates
Application:
09/958,866 →