IP Library › Patent Application 09958866
Patent Application Utility PCT National Stage
App. No. 09/958,866 · Confirmation No. 5458

METHOD AND APPARATUS FOR CLEANING SUBSTRATES

Inventor: Jurgen Lohmuller
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗
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2006-06-05 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2001-12-13 LET. Miscellaneous Incoming Letter 31 View
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Quick Facts
App. No.
09/958,866
Filed
2001-12-13
Effective Filing
2001-10-12
Granted
2002-12-03
Art Unit
1746
PTA
0 days