Patent Assignment
Reel/Frame 012442/0080
Assignment of Assignor's Interest
Recorded: 2002-01-03
Pages: 3
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
1-1, TENJINKITAMACHI, TERANOUCHI-AGARU 4-CHOME HORIKAWA-DORI, KAMIKYO-KU, KYOTO, JAPAN
Covered Property
(1)
Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.