Patent Assignment
Reel/Frame 012442/0813
Assignment of Assignor's Interest
Recorded: 2001-11-02
Received: 2002-01-14
Pages: 3
Assignees
ALPS ELECTRIC CO., LTD.
1-7 YUKIGAYA, OTSUKA-CHO, OTA-KU, TOKYO, JPX, JAPAN
OHMI, TADAHIRO
2-1-17-301 KOMEGAFUKURO AOBA-KU, SENDAL-SHI, MIYAGI-KEN, JPX, JAPAN
Covered Property
(1)
Performance Evaluation Method for Plasma Processing Apparatus
Application:
10/033,443 →